MEMS switch

摘要

A MEMS switch has fixed support, a plate-shaped flexible beam having at least one end immovably supported by the fixed support and having an extending movable surface, a movable electric contact disposed on the movable surface of the flexible beam, a fixed electric contact facing the movable electric contact and disposed at a fixed position relative to the fixed support, first piezoelectric driver disposed above the movable surface of the flexible beam, extending from a portion above the fixed support towards the movable electric contact, and capable of displacing the movable electric contact towards the fixed electric contact by voltage driving, and second piezoelectric driver disposed at least on the movable surface of the flexible beam and capable of so driving a movable part of the flexible beam by voltage driving that the movable electric contact is separated from the fixed electric contact.

主权项

1. A MEMS switch comprising:
fixed support; a plate-shaped flexible beam extending along a first direction having at least one end immovably supported by the fixed support and having an extending movable surface; a movable electric contact disposed on the movable surface of the flexible beam; a fixed electric contact disposed above the movable electric contact, facing the movable electric contact and disposed at a fixed position relative to the fixed support; first piezoelectric driver disposed above the movable surface of the flexible beam, extending along the first direction from a portion above the fixed support towards the movable electric contact, and capable of displacing the movable electric contact towards the fixed electric contact by voltage driving; and second piezoelectric driver disposed at least on the movable surface of the flexible beam in a region containing the movable contact and extending along the first direction, capable of so driving a movable part of the flexible beam by voltage driving that the movable electric contact is separated from the fixed electric contact; wherein either of the first piezoelectric driver and the second piezoelectric driver has a lower electrode, a piezoelectric material layer disposed on the lower electrode, and an upper electrode disposed on the piezoelectric material layer, wherein the movable electric contact is disposed in an intermediate-width region of the flexible beam and the second piezoelectric driver includes a pair of piezoelectric actuators disposed on both outer-width sides of the movable electric contact, and wherein the fixed support comprises an SOI substrate in which an active Si layer is bonded to an Si support substrate via a silicon oxide layer, and the flexible beam comprises part of the active Si layer and has a stripe shape having a constant width and extending in a longitudinal direction.