发明名称 |
Ultrasound element and ultrasound endoscope |
摘要 |
A US element includes a silicon substrate, wherein a lower electrode layer that has a plurality of lower electrode sections, and a plurality of lower wiring sections, and is connected to a lower electrode terminal to which a drive signal and a bias signal are applied, a lower insulating layer, an upper insulating layer in which a plurality of cavities are formed, an upper electrode layer that has a plurality of upper electrode sections and a plurality of upper wiring sections, and is connected to an upper electrode terminal at a ground potential for detecting a capacitance signal, and a protection layer are sequentially stacked on the silicon substrate, and the US element further includes a shield electrode section that is formed at least at an upper side of the lower wiring sections, and is connected to a shield electrode terminal at a ground potential. |
申请公布号 |
US9629609(B2) |
申请公布日期 |
2017.04.25 |
申请号 |
US201414150210 |
申请日期 |
2014.01.08 |
申请人 |
OLYMPUS CORPORATION |
发明人 |
Matsumoto Kazuya;Karaki Kazuhisa;Hasegawa Mamoru;Wakabayashi Katsuhiro |
分类号 |
A61B8/00;A61B8/12;H02N1/00;H02N1/08;B06B1/02 |
主分类号 |
A61B8/00 |
代理机构 |
Scully, Scott, Murphy & Presser, P.C. |
代理人 |
Scully, Scott, Murphy & Presser, P.C. |
主权项 |
1. An ultrasound element, comprising a base substrate,
wherein a lower electrode layer that has a plurality of lower electrode sections, and a plurality of lower wiring sections that connect the plurality of lower electrode sections, and is connected to a lower electrode terminal to which a drive signal and a bias signal are applied, a lower insulating layer, an upper insulating layer in which a plurality of cavities are formed, an upper electrode layer that has a plurality of upper electrode sections that are disposed to face the respective lower electrode sections via the respective cavities, and a plurality of upper wiring sections that connect the plurality of upper electrode sections, and is connected to an upper electrode terminal at a ground potential, for detecting a capacitance signal, and a protection layer are sequentially stacked on the base substrate, the ultrasound element further comprising: a first shield electrode section that is formed at least at an upper side of the lower wiring sections and at a lower side of the upper electrode sections, in a region including regions where the upper electrode sections and the lower electrode sections are disposed to face each other, the first shield electrode section being connected to a shield electrode terminal at a ground potential. |
地址 |
Tokyo JP |