DEVICE HAVING PREFORMED TRIPLE JUNCTIONS TO MAINTAIN ELECTRODE CONDUCTIVITY AND A METHOD FOR MAKING AND USING THE DEVICE

摘要

In systems where insulating deposits form during normal operation, electrodes are configured with a preformed dielectric thereon, wherein the preformed dielectric is formed with a geometric feature that performing a triple junction. These triple junctions enhance low level discharge activity to facilitate localized breakdown of the deposits and maintain electrode conductivity.

主权项

1. A method of making an electrode, comprising the steps of:
preforming a dielectric layer on a surface of the electrode, the dielectric layer including at least one geometric feature configured to overshadow a portion of the surface of the electrode to create a triple junction at the resulting electrode/dielectric/vacuum interface; and shielding, with the geometric feature, the portion of the surface from exposure to deposit forming particles in use to maintain the triple junction.