| 发明名称 |
PROBE CARD AND TESTING METHOD |
| 摘要 |
A probe card and a testing method are disclosed herein. The probe card includes a plurality of probe sets arranged as a testing unit. The testing unit is configured to test a plurality of dies in a test region on a wafer, and to move m unit along a first direction and n unit along a second direction when the test complete so as to test the next test region, in which m and n are integers. |
| 申请公布号 |
US2017108535(A1) |
申请公布日期 |
2017.04.20 |
| 申请号 |
US201615137006 |
申请日期 |
2016.04.25 |
| 申请人 |
GLOBAL UNICHIP CORPORATION ;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIU Chang-Ming |
| 分类号 |
G01R1/073 |
主分类号 |
G01R1/073 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A probe card, comprising:
a plurality of probe sets arranged as a testing unit, wherein the testing unit is configured to test a plurality of dies in a test region on a wafer, and to move m unit along a first direction and n unit along a second direction when the dies are tested, so as to test a next test region, wherein m and n are integers. |
| 地址 |
Hsinchu City TW |
