PELLICLE FOR EUV

摘要

A pellicle is proposed in which an adhesive layer which adheres a pellicle film to a pellicle frame is mixed (filled) with powder of thermally conductive material such as metallic compound so that the heat generated by the strong EUV ray is quickly passed to the pellicle frame from the pellicle film lest the latter is deformed by the heat.

主权项

1. A pellicle for EUV comprising a pellicle frame having two end faces, an adhesive layer laid on one of said end faces of the pellicle frame, a pellicle film which is tensely adhered to the pellicle frame via said adhesive layer, and an agglutinant layer laid on another one of said end faces of the pellicle frame, wherein said adhesive layer is an adhesive composition made of 100 mass parts of an adhesive material and 100 through 4,000 mass parts of thermally conductive filler.