TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

摘要

A baseplate for a temperature controlled substrate support assembly in a vacuum chamber includes a single cavity in an upper surface of the base plate. A cylindrical wall extends upward around an outer perimeter of the base plate to define the cavity. A cover plate arranged on the base plate above the cavity is in thermal contact with the cylindrical wall of the base plate. A plurality of thermoelectric modules is arranged within the cavity in the upper surface of the base plate in thermal contact with the cover plate and the base plate and is sealed from the vacuum chamber and maintained at atmospheric pressure. A plurality of fluid channels is arranged within the base plate below the cavity. A plurality of heat transfer pipes extends downward toward the fluid channels from an upper surface of the base plate within the cavity.

主权项

1. A base plate for a temperature controlled substrate support assembly in a vacuum chamber, the base plate comprising:
an upper surface; a single cavity in the upper surface of the base plate; a cylindrical wall extending upward around an outer perimeter of the base plate to define the cavity; a cover plate arranged on the base plate above the cavity, wherein the cover plate is in thermal contact with the cylindrical wall of the base plate; a plurality of thermoelectric modules arranged within the cavity in the upper surface of the base plate, wherein each of the plurality of thermoelectric modules is in thermal contact with the cover plate and the base plate, and wherein the cavity and the plurality of thermoelectric modules are sealed from the vacuum chamber and maintained at atmospheric pressure; a plurality of fluid channels arranged within the base plate below the cavity; and a plurality of heat transfer pipes extending downward toward the fluid channels from an upper surface of the base plate within the cavity.