| 发明名称 |
EVAPORATION DEVICE AND METHOD |
| 摘要 |
An evaporation device and an evaporation method are disclosed. The evaporation device includes: a coating chamber and a first evaporation source chamber, the coating chamber is provided with a substrate placement component, the first evaporation source chamber is provided with an evaporation source placement component, the evaporation source placement component is configured for placing an evaporation source; the coating chamber and the first evaporation source chamber are provided with a sealing component therebetween; the sealing component is configured to connect the coating chamber and the first evaporation source chamber upon being opened and to disconnect the coating chamber and the first evaporation source chamber upon being closed. |
| 申请公布号 |
US2017107611(A1) |
申请公布日期 |
2017.04.20 |
| 申请号 |
US201615221044 |
申请日期 |
2016.07.27 |
| 申请人 |
BOE TECHNOLOGY GROUP CO., LTD. |
发明人 |
ZHANG Xindi;SUN Junmin |
| 分类号 |
C23C14/56;C23C14/24 |
主分类号 |
C23C14/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An evaporation device, comprising:
a coating chamber and a first evaporation source chamber, wherein the coating chamber is provided with a substrate placement component, and the substrate placement component is configured for placing a substrate, the first evaporation source chamber is provided with an evaporation source placement component, and the evaporation source placement component is configured for placing an evaporation source; and a sealing component provided between the coating chamber and the first evaporation source chamber, wherein the sealing component is configured to connect the coating chamber and the first evaporation source chamber upon being opened and to disconnect the coating chamber and the first evaporation source chamber upon being closed. |
| 地址 |
Beijing CN |
