TRANSFER SYSTEM AND TRANSFER METHOD

摘要

A transfer system includes a robot including a hand configured to transfer a substrate, a transfer chamber within which the robot is disposed, a plurality of substrate-storing cassettes disposed side by side on a sidewall of the transfer chamber in a plan view, and a robot control device configured to control an operation of the robot based on teaching information. The robot control device includes an operation controller configured to cause the robot to transfer the substrate to a storage position while slanting a hand centerline toward the robot away from a storage centerline with respect to a first cassette and while superimposing the hand centerline on the storage centerline with respect to a second cassette.

主权项

1. A transfer system, comprising:
a robot including a hand configured to transfer a substrate; a transfer chamber within which the robot is disposed; a plurality of substrate-storing cassettes disposed side by side on a sidewall of the transfer chamber in a plan view; and a robot control device configured to control an operation of the robot based on teaching information, wherein a line which interconnects a rotation axis of the hand and a reference position as a center of the substrate in a plan view, is defined as a hand centerline, a line which is perpendicular to a front surface as a transfer chamber side surface of each of the cassettes and which passes through a storage position indicating the center of the substrate stored in each of the cassettes, is defined as a storage centerline, the cassettes include a first cassette and a second cassette, and the robot control device includes an operation controller configured to cause the robot to transfer the substrate to the storage position while slanting the hand centerline toward the robot away from the storage centerline with respect to the first cassette and while superimposing the hand centerline on the storage centerline with respect to the second cassette.