VERTICAL MICROBOLOMETER CONTACT SYSTEMS AND METHODS

摘要

Systems and methods are directed to vertical legs for an infrared detector. For example, an infrared imaging device may include a microbolometer array in which each microbolometer includes a bridge and a vertical leg structure that couples the bridge to a substrate such as a readout integrated circuit. The vertical leg structure may run along a path that is parallel to a plane defined by the bridge and may be oriented perpendicularly to the plane. The path may be disposed within, below, or above the plane defined by the bridge.

主权项

1. An infrared imaging device, comprising:
a substrate having a plurality of contacts; and a microbolometer array coupled to and disposed above the substrate having a surface that defines a plane, wherein each microbolometer comprises:
a bridge;a leg structure having at least a first portion that runs non-perpendicularly to the plane and runs between the bridge and at least one of the contacts;wherein the first portion of the leg structure has a first dimension that extends in a direction that is substantially perpendicular to the plane;wherein the first portion of the leg structure has a second dimension that extends in a direction that is substantially parallel to the plane; andwherein the first dimension is greater than the second dimension.