HOLLOW-CAVITY FLIP-CHIP PACKAGE WITH REINFORCED INTERCONNECTS AND PROCESS FOR MAKING THE SAME

摘要

The present disclosure relates to a flip-chip package with a hollow-cavity and reinforced interconnects, and a process for making the same. The disclosed flip-chip package includes a substrate, a reinforcement layer over an upper surface of the substrate, a flip-chip die attached to the upper surface of the substrate by interconnects through the reinforcement layer, an air cavity formed between the substrate and the flip-chip die, and a protective layer encapsulating the flip-chip die and defining a perimeter of the air cavity. Herein, a first portion of each interconnect is encapsulated by the reinforcement layer and a second portion of each interconnect is exposed to the air cavity. The reinforcement layer provides reinforcement to each interconnect.

主权项

1. An apparatus comprising:
a substrate having an upper surface with a plurality of substrate I/O pads; a reinforcement layer over the upper surface of the substrate; a flip-chip die having a die body and a plurality of interconnects extending outward from a bottom surface of the die body, wherein each of the plurality of interconnects connects to a corresponding one of the plurality of substrate I/O pads through the reinforcement layer and at least one portion of the reinforcement layer encapsulates a first portion of each of the plurality of interconnects; an air cavity formed between the bottom surface of the die body and the upper surface of the substrate; and a protective layer extending over a top surface of the die body, down side surfaces of the die body, and toward the upper surface of the substrate to define a perimeter of the air cavity, wherein a second portion of each of the plurality of interconnects is exposed to the air cavity.