Lithographic Patterning

摘要

This disclosure provides embodiments of an approach that enforces coexistence of multiple, aligned block copolymer morphologies within a single patterning layer.

主权项

1. A method for creating patterns on a surface of a substrate, comprising
depositing a polymer brush onto the surface of the substrate; depositing a resist layer; forming grating patterns onto the resists; developing the grating patterns; etching to transfer the grating pattern to the polymer brush; and depositing a block copolymer film onto to the substrate;