CAVITY SEALING APPARATUS

摘要

Certain exemplary aspects of the present disclosure are directed towards a manufacturing apparatus including a first chamber having a first cavity, and a first actuator. The first actuator aligns the opening of the first chamber to an opening in a second chamber having a second cavity, sealing the first cavity to the second cavity. The manufacturing apparatus further includes gas flow componentry that in conjunction with the first actuator and first chamber evacuate the second cavity by drawing a vacuum in the first cavity. After the second cavity is evacuated, the gas flow componentry fills the second cavity filled with a gas by introducing the gas to the first cavity. A second actuator seals the gas in the second cavity by applying a seal that covers the opening in the second chamber while the first and second cavity remains sealed to one another via the first actuator.

主权项

1. An apparatus comprising:
a first chamber having a first cavity and an opening thereto; a first actuator configured and arranged to align the opening of the first chamber to an opening in a second chamber having a second cavity, and to seal the first cavity to the second cavity via the openings; gas flow componentry configured and arranged with the first actuator and first chamber to, with the first cavity sealed to the second cavity,
evacuate the second cavity via the openings by drawing a vacuum in the first cavity, andafter evacuating the second cavity, filling the second cavity with a gas via the openings by introducing the gas to the first cavity; and a second actuator configured and arranged to, with the first cavity sealed to the second cavity, seal the gas in the second cavity by applying a seal that covers the opening in the second chamber.