发明名称 CAPACITIVE PRESSURE MEASURING CELL AND PRESSURE MEASURING DEVICE INCLUDING SUCH A PRESSURE MEASURING CELL
摘要 The invention relates to a capacitive pressure measuring cell for detecting the pressure of a medium adjacent to the pressure measuring cell, comprising a ceramic elastic measuring membrane, the first side of which at least partially contacts the medium and the second side of which facing away from the medium comprises a measuring electrode, and a ceramic cylindrical basic body disposed opposite to the second side of the measuring membrane and comprising at least one counter electrode which forms a measuring capacitance with the measuring electrode.
申请公布号 US2017108393(A1) 申请公布日期 2017.04.20
申请号 US201615293495 申请日期 2016.10.14
申请人 IFM Electronic GmbH 发明人 Blankenhorn Oliver
分类号 G01L9/00;G01L19/00;G01L19/14 主分类号 G01L9/00
代理机构 代理人
主权项 1. Capacitive pressure measuring cell (1) for detecting the pressure of a medium adjacent to the pressure measuring cell (1), comprising a ceramic elastic measuring membrane (2) the first side of which at least partially is in contact with the medium and the second side of which facing away from the medium comprises a measuring electrode (10); and a ceramic cylindrical basic body (3) disposed opposite to the second side of the measuring membrane (2) and comprising at least one counter-electrode (11, 12) which forms a measuring capacitance with the measuring electrode (10), wherein the electrical contact of the measuring and the counter electrode (10, 11, 12) is achieved by through holes (20) provided in the base body (3), wherein the inner walls of the through holes respectively comprise a conductive coating, characterized in that the end portions (21a) of the through holes (20) at the upper side (3a) of the base body (3) each have a funnel-shaped enlargement, wherein the exit edge of each funnel-shaped enlargement is formed in the shape of an ellipse, such that the notch effect is smaller than with a circular shape.
地址 Essen DE