MASK EXTENSION WELDING DEVICE FOR THIN FILM DEPOSITION

摘要

A mask extension welding apparatus for thin film deposition to extend and weld a mask on a frame includes an extension unit configured to extend the mask in a first direction, a pressure unit configured to press the mask towards the frame, and a laser welding unit configured to weld the mask and the frame. The pressure unit includes an upper housing, a lower housing spaced apart from the upper housing with respect to a fluid inlet, and a porous plate disposed at a downstream of the fluid inlet, the porous plate connecting the upper housing and the lower housing, and configured to eject a fluid supplied through the fluid inlet towards the mask.

主权项

1. A mask extension welding apparatus for thin film deposition to extend and weld a mask on a frame, comprising:
an extension unit configured to extend the mask in a first direction; a pressure unit configured to press the mask towards the frame, the pressure unit comprising:
an upper housing;a lower housing spaced apart from the upper housing with respect to a fluid inlet; anda porous plate disposed at a downstream of the fluid inlet, the porous plate connecting the upper housing and the lower housing, and configured to eject a fluid supplied through the fluid inlet towards the mask; and a laser welding unit configured to weld the mask and the frame.