发明名称 |
Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator |
摘要 |
An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, a deflecting member arranged in the optical path on an incidence side of the optical integrator, which deflects the illumination light, a lens element arranged in the optical path between the deflecting member and the optical integrator, which distributes the illumination light in a region, on a pupil plane of the illumination optical apparatus, away from an optical axis of the illumination optical apparatus, and a polarization member arranged in the optical path between the lens element and the optical integrator, which changes a polarization state of the illumination light so that a polarization direction of the illumination light in the region is substantially coincident with a circumferential direction about the optical axis. |
申请公布号 |
US9625826(B2) |
申请公布日期 |
2017.04.18 |
申请号 |
US201313890547 |
申请日期 |
2013.05.09 |
申请人 |
NIKON CORPORATION |
发明人 |
Kudo Takehito;Hirukawa Shigeru |
分类号 |
G03F7/20;G03B27/42 |
主分类号 |
G03F7/20 |
代理机构 |
Oliff PLC |
代理人 |
Oliff PLC |
主权项 |
1. An illumination optical apparatus which illuminates a pattern on a mask with illumination light, the illumination optical apparatus comprising:
an optical integrator arranged in an optical path of the illumination light; a deflecting member arranged in the optical path on an incidence side of the optical integrator, which deflects the illumination light so that the illumination light is distributed in a region on a pupil plane of the illumination optical apparatus, the region being away from an optical axis of the illumination optical apparatus; an optical system comprising a lens element, the optical system being arranged in the optical path between the deflecting member and the optical integrator so that a lens optical axis of the lens element is coincident with the optical axis of the illumination optical apparatus; and a polarization member arranged in the optical path between the lens element and the optical integrator, which changes a polarization state of the illumination light so that a polarization direction of the illumination light passing through the region is substantially coincident with a circumferential direction about the optical axis on the pupil plane, wherein the deflecting member is capable of modifying the region on the pupil plane by changing a deflecting property thereof. |
地址 |
Tokyo JP |