发明名称 Semiconductor device having an inactive-fin
摘要 A semiconductor device includes a multi-fin active region having a plurality of sub-fins sequentially arranged on a substrate. A gate electrode crosses the multi-fin active region. Source/drain regions are disposed on the sub-fins except a first sub-fin and a last sub-fin. A contact plug is disposed on the source/drain regions.
申请公布号 US9627481(B2) 申请公布日期 2017.04.18
申请号 US201615051056 申请日期 2016.02.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 Park Byungjae;Kim Myeongcheol;Cho Hagju
分类号 H01L29/08;H01L29/78;H01L27/088 主分类号 H01L29/08
代理机构 F. Chau & Associates, LLC 代理人 F. Chau & Associates, LLC
主权项 1. A semiconductor device, comprising: a multi-fin active region having a plurality of sub-fins sequentially arranged on a substrate; a gate electrode crossing the multi-fin active region; source/drain regions disposed on the sub-fins except a first sub-fin and a last sub-fin; and a contact plug disposed on the source/drain regions.
地址 Suwon-si, Gyeonggi-Do KR