发明名称 |
Semiconductor device having an inactive-fin |
摘要 |
A semiconductor device includes a multi-fin active region having a plurality of sub-fins sequentially arranged on a substrate. A gate electrode crosses the multi-fin active region. Source/drain regions are disposed on the sub-fins except a first sub-fin and a last sub-fin. A contact plug is disposed on the source/drain regions. |
申请公布号 |
US9627481(B2) |
申请公布日期 |
2017.04.18 |
申请号 |
US201615051056 |
申请日期 |
2016.02.23 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
Park Byungjae;Kim Myeongcheol;Cho Hagju |
分类号 |
H01L29/08;H01L29/78;H01L27/088 |
主分类号 |
H01L29/08 |
代理机构 |
F. Chau & Associates, LLC |
代理人 |
F. Chau & Associates, LLC |
主权项 |
1. A semiconductor device, comprising:
a multi-fin active region having a plurality of sub-fins sequentially arranged on a substrate; a gate electrode crossing the multi-fin active region; source/drain regions disposed on the sub-fins except a first sub-fin and a last sub-fin; and a contact plug disposed on the source/drain regions. |
地址 |
Suwon-si, Gyeonggi-Do KR |