Vacuum system

摘要

The invention concerns a vacuum system, comprising a first vacuum chamber and a second vacuum chamber, the first vacuum chamber being evacuated by a first vacuum pump, in particular a turbomolecular pump, the first and the second vacuum chamber being connected by a passage, wherein the passage is surrounded by a sealing arrangement comprising an inner seal and an outer seal with a plenum positioned between the inner seal and the outer seal, the plenum being evacuated by a support vacuum pump, and wherein at least one sealing face of the inner seal consists of the wall material of the first or the second vacuum chamber, in particular the inner seal being formed by direct contact between the wall material of the first vacuum chamber and the wall material of the second vacuum chamber. Additionally, the invention concerns a mass spectrometry system.

主权项

1. Vacuum system, comprising a first vacuum chamber (13) and a second vacuum chamber (12), the first vacuum chamber (13) being evacuated by a first vacuum pump, in particular a turbomolecular pump, the first vacuum chamber (13) and the second vacuum chamber (12) being adjacent and connected by a passage, wherein the passage is circumferentially surrounded by a sealing arrangement comprising an inner seal (115) and an outer seal (114) with a plenum (106) positioned between the inner seal (115) and the outer seal (114), the plenum (106) being evacuated by a support vacuum pump (21), and wherein at least one sealing face of the inner seal (115) consists of the wall material (2, 3) of the first vacuum chamber (13) or the second vacuum chamber (12), in particular the inner seal (115) being formed by direct contact between the wall material (3) of the first vacuum chamber (13) and the wall material (2) of the second vacuum chamber (12).