Fuse structure and method of blowing the same

摘要

A fuse structure and a method of blowing the same are provided. The fuse structure includes a conductive line on a substrate, first and second vias on the conductive line that are spaced apart from each other, a cathode electrode line that is electrically connected to the first via, an anode electrode line that is electrically connected to the second via, and a dummy pattern that is adjacent at least one of the cathode and anode electrode lines and electrically isolated from the conductive line.

主权项

1. A method of blowing a fuse structure that includes a conductive line on a substrate, first and second vias on the conductive line and spaced apart from each other, a cathode electrode line electrically connected to the first via, and an anode electrode line electrically connected to the second via, where the conductive line includes a first material having a first electromigration rate and the first and second vias and the cathode and anode electrode lines include a second material having a second electromigration rate that is higher than the first electromigration rate, the method comprising:
letting a voltage difference occur between the cathode and anode electrode lines; moving a portion of the second material of the cathode electrode line through the first via, the conductive line, and the second via to the anode electrode line in order to increase a width of the anode electrode line; and forming a void in the first via to blow the fuse structure, wherein the fuse structure further includes: a first dummy pattern adjacent the cathode electrode line; and a second dummy pattern adjacent the anode electrode line, the first and second dummy patterns including substantially the same material as the material included in the cathode and the anode electrode lines.