Method for producing piezoelectric actuator and method for producing liquid transport apparatus

摘要

A vibration layer is formed by the AD method on a cavity plate before forming pressure chambers, a common electrode is formed on the vibration layer, and a piezoelectric layer is formed on the common electrode by the AD method. Subsequently, the pressure chambers are formed in the cavity plate by the etching. After that, individual electrodes are formed on the piezoelectric layer. Subsequently, the stack of the cavity plate, the vibration layer, the common electrode, the piezoelectric layer, and the individual electrodes is heated at about 850° C. to simultaneously perform the annealing of the piezoelectric layer and the sintering of the individual electrodes and the common electrode. Accordingly, the atoms of the cavity plate are suppressed from being diffused into the driving portions of the piezoelectric layer.

主权项

1. A method for producing a piezoelectric actuator, comprising:
providing a base member; locating a ceramics material on a surface of the base member; forming a vibration layer that is fixed on the base member by heating the ceramics material at a temperature below a first temperature at which constitutive atoms are diffused from the base member to the ceramics material, without raising the temperature of the ceramics material and the base member above the first temperature; and forming a piezoelectric layer on a surface, of the vibration layer, not facing the base member.