MEMS accelerometer

摘要

A MEMS acceleration sensor comprising: a frame, a plurality of proofmasses; a plurality of flexures; a plurality of hinges and a plurality of gauges. The frame, proofmasses, flexures, hinges and gauges designed to measure acceleration in a direction perpendicular to the device plane while being generally resistant to motions parallel to the device plane. The measurement of the acceleration is accomplished through the piezoresistive effect of the strain in the gauges.

主权项

1. A MEMS acceleration sensor comprising:
a frame; a first proofmass located within the frame, the first proofmass separated from the frame by a gap, wherein the first proofmass includes a left side, right side, top, bottom, horizontal midline halfway between the top and the bottom and vertical midline halfway between the left side and right side; a first channel starting from the top of the first proofmass and extending down into the first proofmass towards the bottom past the horizontal midline to a first channel end, the first channel located right of the vertical midline; a second channel starting from the bottom of the first proofmass and extending up into the first proofmass towards the top past the horizontal midline to a second channel end, the second channel located left of the vertical midline; a first flexure coupling the first proofmass to the frame, the first flexure starting from the right side of the first proofmass and extending in towards the first channel along the top of the first proofmass; a second flexure coupling the first proofmass to the frame, the second flexure starting from the right side of the first proofmass and extending in towards the first channel along the bottom of the first proofmass; a third flexure coupling the first proofmass to the frame, the third flexure starting from the left side of the first proofmass and extending in towards the second channel along the top of the first proofmass; a fourth flexure coupling the first proofmass to the frame, the fourth flexure starting from the left side of the first proofmass and extending in towards the second channel along the top of the first proofmass; a second proofmass located within the first channel and coupled to the first proofmass via a first hinge and a first pair of gauges at the first channel end and, coupled to the frame at the top via a second hinge and a second pair of gauges; and, a third proofmass located within the second channel and coupled to the first proofmass via a third hinge and a third pair of gauges at the second channel end and coupled to the frame at the bottom via a fourth hinge and a fourth pair of gauges.