| 发明名称 | Thin film deposition apparatus, deposition method using the same, and method of manufacturing organic light-emitting display apparatus by using the apparatus | ||
| 摘要 | A thin film deposition apparatus, a deposition method using the same, and a method of manufacturing an organic light-emitting display apparatus by using the apparatus are provided. A thin film deposition apparatus is provided that includes a chamber containing a substrate holder on which a substrate is mounted, a plurality of rotary shaft units that change rotation and an inclination angle of the substrate holder, and a target unit that supplies a thin film material for formation on the substrate. | ||
| 申请公布号 | US9624575(B2) | 申请公布日期 | 2017.04.18 |
| 申请号 | US201414262088 | 申请日期 | 2014.04.25 |
| 申请人 | SAMSUNG DISPLAY CO., LTD. | 发明人 | Lee Ung-Soo;Park Jin-Woo;Choi Su-Hyuk |
| 分类号 | H01L23/10;H01L23/12;C23C14/50;C23C14/34;H01L51/56;H01L51/00;H01J37/34;H01L21/687;H01J37/32 | 主分类号 | H01L23/10 |
| 代理机构 | Lee & Morse, P.C. | 代理人 | Lee & Morse, P.C. |
| 主权项 | 1. A thin film deposition apparatus comprising a chamber containing: a substrate holder on which a substrate is mounted; a plurality of rotary shaft units above the substrate holder that change rotation and an inclination angle of the substrate holder; and a target unit below the substrate holder that supplies a thin film material for formation on the substrate. | ||
| 地址 | Yongin, Gyeonggi-Do KR | ||