Apparatus, method and non-transitory storage medium for accommodating and processing a substrate

摘要

A substrate accommodating and processing apparatus is provided with a cassette mounting table, a processing part, a substrate transfer mechanism, a partition wall, a cassette stage, and a lid attaching/detaching mechanism. The lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions. The mechanism is also provided with a lid abnormality detecting sensor, a lid attaching/detaching mechanism closing sensor, a lid attaching/detaching mechanism opening sensor, a pressure sensor and a control part.

主权项

1. A substrate accommodating and processing apparatus, comprising:
a cassette mounting table configured to mount a cassette having an opening for charging and discharging a substrate therethrough and a lid attachable to and detachable from the opening; a processing part configured to process the substrate accommodated in the cassette of the cassette mounting table; a substrate transfer mechanism configured to transfer the substrate to the processing part and to return the substrate after being processed to the cassette of the cassette mounting table; a partition wall configured to divide the cassette mounting table and a displacement part of the substrate transfer mechanism from each other and to have an opening larger than the opening of the cassette; a cassette stage configured to be displaced on the cassette mounting table and to be movable forward and rearward to a docked position causing the mounted cassette to be in contact with the opening of the partition wall and an undocked position retracted from the docked position; a lid attaching/detaching mechanism configured to remove the lid from the opening of the cassette and engage the lid to the opening of the cassette via the opening of the partition wall, wherein the lid attaching/detaching mechanism is provided with a key configured to be engaged with a key hole installed in the lid, and configured to switch a latch between locking and unlocking positions, the latch being removed from or caught into the opening of the cassette, and a suction holding member configured to suction-hold and support the lid; a lid abnormality detecting sensor displaced at an edge of the opening of the partition wall to confirm an open/closed state of the lid; a lid attaching/detaching mechanism closing sensor and a lid attaching/detaching mechanism opening sensor respectively configured to detect a lid closing position in which the lid held and supported by the lid attaching/detaching mechanism is engaged and a lid opening position retracted from the lid closing position; a pressure sensor configured to detect a negative pressure allowing the suction holding member to suction-hold and support the lid; and a control part configured to receive detection signals of the lid abnormality detecting sensor, the lid attaching/detaching mechanism closing sensor, the lid attaching/detaching mechanism opening sensor and the pressure sensor and to control operation of moving the lid attaching/detaching mechanism to opening and closing positions, operation of locking and unlocking the key, and operation of moving the cassette mounted onto the cassette stage to the docked position and the undocked position, wherein based on a control signal of the control part, after the processed substrate is accommodated in the cassette and the lid is closed against the opening of the cassette, when the lid attaching/detaching mechanism with the lid not held and supported is retracted from the lid closing position to the lid opening position, the lid attaching/detaching mechanism opening sensor detects the lid opening position of the lid and the lid abnormality detecting sensor detects whether or not there is a lid abnormality to determine an abnormality of the lid closed state.