Epitaxial growth of high quality vanadium dioxide films with template engineering

摘要

Layered oxide structures comprising an overlayer of high quality VO2 and methods of fabricating the layered oxide structures are provided. Also provided are high-speed switches comprising the layered structures and methods of operating the high-speed switches. The layered oxide structures include high quality VO2 epitaxial films on isostructural SnO2 growth templates.

主权项

1. A layered oxide structure comprising:
a substrate comprising single-crystalline TiO2; an intervening layer comprising columnar, crystalline domains of rutile SnO2 on the substrate, wherein the columnar, crystalline domains of SnO2 have an epitaxial relationship with the single-crystalline TiO2; and an overlayer comprising crystalline domains of VO2 on the intervening layer, wherein the crystalline domains of VO2 have an epitaxial relationship with the columnar, crystalline domains of rutile SnO2; wherein the VO2 has a metal-insulator phase transition critical temperature, below which the VO2 has a monoclinic crystal structure and above which the VO2 has a rutile crystal structure.