Method of making micromachined neural probes

摘要

A neural probe includes at least one shaft, at least one first electrode disposed on a first side of the at least one shaft, and at least one second electrode disposed on a second side of the at least one shaft. The at least one second electrode is separately addressable from the at least first electrode.

主权项

1. A method of making a neural probe using temporary adhesive attachment between a neural probe substrate and a carrier, comprising:
providing a neural probe substrate having a thickness of 150 μm or less having a first side and having a second side; patterning at least one first electrode on the a first side of the substrate; attaching the second side of the substrate having the patterned first electrode on the first side to a carrier, wherein the attaching is carried out with an adhesive; patterning the substrate into the neural probe comprising at least one shaft connected to a base; and removing the neural probe from the carrier.