Methods of fabricating micro- and nanostructure arrays and structures formed therefrom

摘要

Methods of fabricating micro- and nanostructures comprise top-down etching of lithographically patterned GaN layer to form an array of micro- or nanopillar structures, followed by selective growth of GaN shells over the pillar structures via selective epitaxy. Also provided are methods of forming micro- and nanodisk structures and microstructures formed from thereby.

主权项

1. A method of fabricating an array of microstructures, comprising the steps of:
providing an epilayer of gallium nitride (GaN) grown on a substrate; etching an array of GaN pillars in said epilayer; and growing GaN shells on said etched array of GaN pillars to form core-shell structures via selective epitaxy, wherein a first portion of said GaN shells are doped with a first material, and a second portion of said GaN shells are doped with a second material different than said first material.