| 发明名称 | Nanoelectromechanical antifuse and related systems | ||
| 摘要 | An antifuse apparatus can include a cantilever extending from a first electrode portion to terminate in a distal end. A second electrode portion can be spaced apart from the cantilever by an air gap. In response to a program voltage across the first and second electrode portions, the cantilever can be adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one permanent programmed condition, corresponding to a short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion. | ||
| 申请公布号 | US9628086(B2) | 申请公布日期 | 2017.04.18 |
| 申请号 | US201414542343 | 申请日期 | 2014.11.14 |
| 申请人 | Case Western Reserve University | 发明人 | He Ting;Zhang Fengchao;Bhunia Swarup;Feng Philip X. -L. |
| 分类号 | H01L23/525;H03K19/177;G11C17/16;G01R27/02;H01L23/544;G11C17/18;H01L23/538;H01L23/00;H01L23/62 | 主分类号 | H01L23/525 |
| 代理机构 | Tarolli, Sundheim, Covell, Tummino LLP | 代理人 | Tarolli, Sundheim, Covell, Tummino LLP |
| 主权项 | 1. An antifuse apparatus comprising: a cantilever extending from a first electrode portion to terminate in a distal end; a second electrode portion spaced apart from the cantilever by an air gap; a third electrode having a contact surface that is adjacent a surface of the second electrode portion; and in response to a program voltage across the first and second electrode portions, the cantilever being adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one programmed condition, corresponding to a permanent short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion. | ||
| 地址 | Cleveland OH US | ||