| 发明名称 |
ELECTRO-OPTICAL DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS |
| 摘要 |
An electro-optical apparatus has an element substrate that is provided with a mirror and a sealing member which seals the mirror, and the sealing member includes a light-transmitting cover which faces the mirror opposite from the element substrate. An infrared cut filter is laminated on the light-transmitting cover. |
| 申请公布号 |
US2017102516(A1) |
申请公布日期 |
2017.04.13 |
| 申请号 |
US201615385106 |
申请日期 |
2016.12.20 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
KONDO Manabu |
| 分类号 |
G02B7/18;B81B7/00;G03B21/00;B81C1/00;G02B5/20;G02B26/08 |
主分类号 |
G02B7/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing an electro-optical device, comprising:
preparing a first wafer that is provided with a mirror, a driving element that drives the mirror, and a terminal; forming a translucent second wafer having a bottom section with a concave section provided thereon, the second wafer having an infrared cut filter that overlaps with the concave section; adhering a face of the first wafer on a side on which the mirror is provided to a face of the second wafer on which the concave section is provided such that the mirror and the concave section overlap in planar view; and splitting the first wafer and the second wafer. |
| 地址 |
Tokyo JP |
