| 发明名称 |
FILM FORMING MASK, FILM FORMING METHOD AND METHOD FOR MANUFACTURING DISPLAY DEVICE |
| 摘要 |
A film-forming mask includes a mask body having a first surface facing a film forming surface, a second surface opposite to the first surface, and an opening exposing a part of the film forming surface. The mask body is thinned from the side of the first surface along an edge of the opening. |
| 申请公布号 |
US2017104185(A1) |
申请公布日期 |
2017.04.13 |
| 申请号 |
US201615283834 |
申请日期 |
2016.10.03 |
| 申请人 |
Japan Display Inc. |
发明人 |
WATANABE Taiki |
| 分类号 |
H01L51/56;C23C16/04;H01L51/00;H01L51/52;H01L27/32 |
主分类号 |
H01L51/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A film-forming mask, comprising:
a mask body having a first surface facing a film forming surface, a second surface opposite to the first surface, and an opening exposing a part of the film forming surface; wherein the mask body is thinned from the side of the first surface along an edge of the opening. |
| 地址 |
Tokyo JP |
