Temperature Control in RF Chamber with Heater and Air Amplifier

摘要

Systems, methods, and computer programs are presented for controlling the temperature of a window in a semiconductor manufacturing chamber. One apparatus includes a heater for receiving and heating a flow of air and an air amplifier coupled to pressurized gas. The air amplifier has an input that receives the flow of air from the heater, and the air amplifier having an output. A duct is coupled to the output of the air amplifier and a plenum is coupled to the duct. The plenum receives the flow of air and distributes the flow of air over a window of a plasma chamber. A temperature sensor is situated about the window of the plasma chamber and a controller is provided to control the air amplifier and the heater based on a temperature measured by the temperature sensor.

主权项

1. An apparatus, comprising:
a heater for receiving and heating a flow of air; an air amplifier coupled to pressurized gas, the air amplifier having an input that receives the flow of air from the heater, the air amplifier having an output; a duct coupled to the output of the air amplifier; a plenum coupled to the duct, wherein the plenum receives the flow of air and distributes the flow of air over a window of a plasma chamber; a temperature sensor situated about the window of the plasma chamber; and a controller defined to control the air amplifier and the heater based on a temperature measured by the temperature sensor.