SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SURFACE WITH A HIGH ASPECT RATIO

摘要

The invention relates to a scanning probe microscope, having: (a) a scanning device for scanning a measurement tip over a surface; (b) a cantilever for the measurement tip, wherein the cantilever has a torsion region; (c) wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and (d) a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than with-out pivoting the measurement tip.

主权项

1. A scanning probe microscope, having:
a. a scanning device for scanning a measurement tip over a surface; b. a cantilever for the measurement tip, wherein the cantilever has a torsion region; c. wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and d. a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip, wherein the scanning device is configured to extend a distance feedback loop for the z-movement to a z-x-movement, wherein the x-direction indicates a fast scan direction.