FORCE DETECTION APPARATUS

摘要

A force detection apparatus includes a substrate and a force transmission block. The substrate includes: a high-sensitive mesa gauge that is provided on a main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface; a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance, and includes a top surface; and a mesa lead that is provided on the main surface, extends in a third direction, and includes a top surface. The force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.

主权项

1. A force detection apparatus comprising:
a substrate including a main surface; and a force transmission block, wherein: the substrate includes
a high-sensitive mesa gauge that is provided on the main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface,a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance in accordance with compressive stress, and includes a top surface, anda mesa lead that is provided on the main surface, extends in a third direction from a connection portion connecting the high-sensitive mesa gauge and the low-sensitive mesa gauge, and includes a top surface; and the force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.