Apparatus and Method for Printing Multilayer Organic Thin Films from Vapor Phase in an Ultra-Pure Gas Ambient

摘要

Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

主权项

1. An organic printing deposition system, comprising:
a print head comprising:
a nozzle block comprising a delivery aperture, the delivery aperture being in fluid communication with a source of organic material to be deposited on a substrate by the printing deposition system;one or more shield gas distribution channels, each shield gas distribution channel being disposed above or below the delivery aperture when viewed from below the nozzle block; andone or more exhaust channels disposed adjacent to the delivery aperture such that, during operation of the print head, non-condensing gas flow generated by the delivery aperture is captured by an exhaust aperture; wherein each of the one or more shield gas distribution channels is arranged to provide a flow of shield gas that prevents material from a chamber ambient in which the print head is operated from reaching the exhaust apertures of the nozzle block.