IMAGE SENSORS USING DIFFERENT PHOTOCONVERSION REGION ISOLATION STRUCTURES FOR DIFFERENT TYPES OF PIXEL REGIONS

摘要

An image sensor includes a semiconductor substrate, a first pair of photoelectric conversion regions in a first pixel region of the substrate and a first isolation structure between the photoelectric conversion regions of the first pair of photoelectric conversion regions. The sensor further includes a second pair of photoelectric conversion regions in a second pixel region of the substrate adjacent the first pixel region and a second isolation structure between the photoelectric conversion regions of the second pair of photoelectric conversion regions and having different optical properties than the first isolation structure. First and second different color filters (e.g., green and red) may be disposed on respective ones of the first and second pixel regions

主权项

1. An image sensor, comprising:
a semiconductor substrate of a first conductivity type; a device separation layer disposed in the semiconductor substrate and defining first pixel regions and second pixel regions therein; respective pairs of first and second photoelectric conversion devices of a second conductivity type disposed in the semiconductor substrate in respective ones of the first and second pixel regions; respective first isolation structures disposed in the semiconductor substrate between the first and second photoelectric conversion devices in respective ones of the first pixel regions; and respective second isolation structures disposed in the semiconductor substrate between the first and second photoelectric conversion devices in respective ones of the second pixel regions, the second isolation structures being different from the first isolation structures in terms of their refractive indices and/or shapes, wherein the first and second pixel regions are arranged in a matrix along first and second orthogonal directions and wherein the second pixel regions are disposed between adjacent ones of the first pixel regions in the first direction and between adjacent ones of the first pixel regions in the second direction.