METHOD FOR PRODUCING SILICON USING MICROWAVE, AND MICROWAVE REDUCTION FURNACE

摘要

A microwave reduction furnace including a reaction furnace provided with a refractory chamber of silica or silicon carbide for storing a material therein, a supply section for supplying the material into the refractory chamber, the material being a mixture of a silica powder and a graphite powder or a mixture of a silica powder, a silicon carbide powder and a graphite powder, a discharge section for discharging molten silicon, obtained through reduction, out of the chamber, and a microwave oscillator for outputting microwave toward the refractory chamber in the reaction furnace with a degree of directionality by virtue of a helical antenna or a waveguide.

主权项

1. A microwave reduction furnace comprising:
a reaction furnace provided with a refractory chamber of silica or silicon carbide for storing a material therein; a supply section for supplying the material into the refractory chamber, the material being a mixture of a silica powder and a graphite powder or a mixture of a silica powder, a silicon carbide powder and a graphite powder; a discharge section for discharging molten silicon, obtained through reduction, out of the chamber; and a microwave oscillator for outputting microwave toward the refractory chamber in the reaction furnace with a degree of directionality by virtue of a helical antenna or a waveguide.