FLUIDIC DEVICE, FLUID CONTROL METHOD, TESTING DEVICE, TESTING METHOD, AND FLUIDIC DEVICE MANUFACTURING METHOD

摘要

A fluidic device includes a valve configured to adjust a fluid flow in a first direction of a flow path. The fluidic device includes: a diaphragm of the valve; a first substrate having a groove that constitutes the flow path and a protrusion part at a position facing the diaphragm in the groove; and a second substrate to which the diaphragm is fixed at a first fixation part and a second fixation part, wherein a length from a first end part of the protrusion part to a second end part of the protrusion part seen in the first direction is greater than a length from the first fixation part to the second fixation part.

主权项

1. A fluidic device comprising a valve configured to adjust a fluid flow in a first direction of a flow path, the fluidic device comprising:
a diaphragm of the valve; a first substrate having a groove that constitutes the flow path and a protrusion part at a position facing the diaphragm in the groove; and a second substrate to which the diaphragm is fixed at a first fixation part and a second fixation part, wherein a length from a first end part of the protrusion part to a second end part of the protrusion part seen in the first direction is greater than a length from the first fixation part to the second fixation part.