发明名称 Semiconductor device with a P-N junction for reduced charge leakage and method of manufacturing the same
摘要 Provided are improved semiconductor memory devices and methods for manufacturing such semiconductor memory devices. A method may incorporate the formation of a p-n junction in a conductive layer. The method may allow for the production of semiconductor memory devices of reduced size.
申请公布号 US9620603(B2) 申请公布日期 2017.04.11
申请号 US201514694325 申请日期 2015.04.23
申请人 Macronix International Co., Ltd. 发明人 Ku Shaw-Hung;Lee Chih-Hsiung
分类号 H01L29/76;H01L29/423;H01L21/28;H01L29/49 主分类号 H01L29/76
代理机构 Alston & Bird LLP 代理人 Alston & Bird LLP
主权项 1. A gate structure comprising: a substrate; a first dielectric layer disposed along the substrate; a first conductive layer disposed along the dielectric layer; a second dielectric layer, and a third dielectric layer, wherein the second dielectric layer and the third dielectric layer are disposed along a sidewall of the first conductive layer and the second dielectric layer is disposed along and over the third dielectric layer, and wherein the first conductive layer comprises p-type dopants and n-type dopants and wherein the p-type dopants form a p-type dopant area and the n-type dopants form an n-type dopant area.
地址 Hsin-chu TW