Reactive depletion of reactor deposits in harvesting polycrystalline silicon rods

摘要

The Siemens process for deposition of polycrystalline silicon in the form of rods in a sealed reactor is improved by, after introduction of deposition gas has ceased, introducing a ventilating gas into the partially sealed reactor, withdrawing a gas stream from the reactor, and monitoring the components in the gas stream withdrawn until a desired concentration of one or more components is reached, and opening the reactor to remove the rods.

主权项

1. A process for depositing polycrystalline silicon, comprising introducing a reaction gas comprising a silicon-containing component and hydrogen into a reactor positioned on a base plate, as a result of which polycrystalline silicon is deposited in the form of rods, wherein the reactor, after the deposition has ended, is partially opened and ventilated for a particular period prior to full opening and removal of the rods, wherein moistened nitrogen and/or air is introduced into the reactor as a medium for ventilating.