Mathematical image assembly in a scanning-type microscope

摘要

A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S1} of a set {Sn}, gathering data from a first collection of sparsely distributed sampling points {P1} of set {Pn}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}, and an image of the specimen is assembled using the set {Pn} as input to an integrative mathematical reconstruction procedure.

主权项

1. A method of accumulating an image of a specimen using a scanning-type microscope, comprising the following steps:
providing a beam of radiation that is directed from a source through an illuminator so as to irradiate the specimen; providing a detector for detecting a flux of radiation emanating from the specimen in response to said irradiation; causing said beam to undergo scanning motion relative to a surface of the specimen, and recording an output of the detector as a function of scan position, in a first sampling session S1, gathering detector data from a first collection P1 of sampling points distributed sparsely across the specimen, the collection P1 comprising fewer than all the sampling points in a sampling grid; repeating this the procedure of gathering detector data from subsequent collections of sampling points so as to accumulate a set {Pn} of such collections, gathered during an associated set {Sn} of sampling sessions, each set with a cardinality N>1; assembling an image of the specimen by using the set {Pn} as input to an integrative mathematical reconstruction procedure, wherein, as part of said assembly process, a mathematical registration correction is made to compensate for drift mismatches between different members of the set {Pn}.