| 发明名称 | Vapor deposition apparatus | ||
| 摘要 | A vapor deposition apparatus including a first region including a first injection unit configured to inject a first raw material, and a second region including a second injection unit configured to inject a second raw material, wherein the second injection unit includes a plasma generation unit, wherein the plasma generation unit includes a plasma generator, a corresponding surface surrounding the plasma generator, and a plasma generation space between the plasma generator and the corresponding surface, and wherein the plasma generator has a groove in a lengthwise direction of the plasma generator. | ||
| 申请公布号 | US9617635(B2) | 申请公布日期 | 2017.04.11 |
| 申请号 | US201313843801 | 申请日期 | 2013.03.15 |
| 申请人 | Samsung Display Co., Ltd. | 发明人 | Jang Cheol;Kim Seung-Hun;Song Seung-Yong;Kim Jin-Kwang |
| 分类号 | C23C16/50;C23C16/452;C23C16/455;C23C16/54;H01J37/32 | 主分类号 | C23C16/50 |
| 代理机构 | Lewis Roca Rothgerber Christie LLP | 代理人 | Lewis Roca Rothgerber Christie LLP |
| 主权项 | 1. A vapor deposition apparatus comprising: a first region comprising a first injection unit configured to inject a first raw material; and a second region comprising a second injection unit configured to inject a second raw material, wherein the second injection unit comprises a plasma generation unit, wherein the plasma generation unit comprises: a plasma generator comprising: a core unit in a center of the plasma generator; andan outer circumferential unit at least partially surrounding the core unit;a corresponding surface surrounding the plasma generator; anda plasma generation space between the plasma generator and the corresponding surface, and wherein the plasma generator has a groove formed in the outer circumferential unit and extended into the core unit in a lengthwise direction of the plasma generator to expose an inner portion of the core unit. | ||
| 地址 | Yongin-si KR | ||