MEMS anti-phase vibratory gyroscope

摘要

A MEMS anti-phase vibratory gyroscope includes two measurement masses with a top cap and a bottom cap each coupled with a respective measurement mass. The measurement masses are oppositely coupled with each other in the vertical direction. Each measurement mass includes an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame. The two measurement masses are coupled with each other through the outer frame. The inner frame is coupled with the outer frame by a plurality of first elastic beams. The mass is coupled with the inner frame by a plurality of second elastic beams. A comb coupling structure is provided along opposite sides of the outer frame and the inner frame. The two masses vibrate toward the opposite direction, and the comb coupling structure measures the angular velocity of rotation.

主权项

1. A MEMS anti-phase vibratory gyroscope, comprising:
two measurement structures, each measurement structure including an outer frame, an inner frame located within the outer frame, and a mass located within the inner frame, wherein the two measurement structures are coupled with each other in the vertical direction through the outer frame, the inner frame is coupled with the outer frame by a plurality of first elastic beams, and the mass is coupled with the inner frame by a plurality of second elastic beams; a top cap and a bottom cap, each coupled with a respective one of the measurement structures; and a comb structure provided along opposite sides of the outer frame and the inner frame; wherein the two masses vibrate toward the opposite vertical direction, and the comb structure measures the angular velocity of rotation.