Scalable biochip and method for making

摘要

The present disclosure provides a biochip and methods of fabricating. The biochip includes a fluidic part and a sensing part bonded together using a polymer. The fluidic part has microfluidic channel pattern on one side and fluidic inlet and fluidic outlet on the other side that are fluidly connected to the microfluidic channel pattern. The fluidic inlet and fluidic outlet are formed by laser drilling after protecting the microfluidic channel pattern with a sacrificial protective layer. The polymer bonding is performed at low temperature without damaging patterned surface chemistry on a sensing surface of the sensing part.

主权项

1. A method of manufacturing a biochip, comprising:
forming a microfluidic channel pattern on a fluidic substrate; depositing a sacrificial protective layer over the microfluidic channel pattern; laser drilling through-holes in the fluidic substrate; removing the sacrificial protective layer; providing a sensing wafer having a pattern of modified surface; forming a polymer pattern on the sensing wafer or on a microfluidic channel pattern side of the fluidic substrate; and bonding the sensing wafer and the fluidic substrate via the polymer pattern, after forming the microfluidic channel pattern, at a temperature less than about 100 degrees Celsius, the bonding being done in a manner that the microfluidic channel pattern on the fluidic substrate extends away from the through-holes of the fluidic substrate and along an interface of the fluidic substrate and the sensing wafer.