| 发明名称 | Method to fabricate micro and nano diamond devices | ||
| 摘要 | A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact. | ||
| 申请公布号 | US9620596(B2) | 申请公布日期 | 2017.04.11 |
| 申请号 | US201414490518 | 申请日期 | 2014.09.18 |
| 申请人 | Sandia Corporation | 发明人 | Morales Alfredo M.;Anderson Richard J.;Yang Nancy Y. C.;Skinner Jack L.;Rye Michael J. |
| 分类号 | H01L29/16;H01L29/04;H01L29/06;H01L29/66;H01L29/775;H01L21/04 | 主分类号 | H01L29/16 |
| 代理机构 | Blakely, Sokoloff, Taylor & Zafman, LLP | 代理人 | Blakely, Sokoloff, Taylor & Zafman, LLP |
| 主权项 | 1. An apparatus comprising: a first contact and a separate second contact on a substrate; and a nanowire disposed between a first contact pad and a second contact pad, the nanowire and the first contact pad and the second contact pad comprising a single crystalline or polycrystalline diamond material patterned from a layer of the diamond material on the substrate, wherein the first contact is disposed on the first contact pad and the second contact is disposed on the second contact pad, wherein the nanowire comprises a trapezoidal shape. | ||
| 地址 | Albuquerque NM US | ||