Internal power supply circuit, semiconductor device, and semiconductor device manufacturing method

摘要

An internal power supply circuit supplies a power supply voltage to an internal circuit of a semiconductor device via an internal power supply line. The internal power supply circuit includes a reference potential generating circuit that is configured to generate a plurality of reference potentials having different temperature dependencies from each other, an internal voltage generating circuit that generates the power supply voltage with reference to a reference potential generated by the reference potential generating circuit, and a control circuit that selects a reference potential to be generated by the reference potential generating circuit.

主权项

1. A semiconductor device comprising:
a reference potential generating circuit generating a plurality of reference potentials in parallel to each other, the reference potentials being different in temperature dependency from each other; a control circuit that selects one of the reference potentials; an internal voltage generating circuit that generates a power supply voltage with reference to the one of the reference potentials; and an internal circuit that is supplied with the power supply voltage, wherein the reference potential generating circuit includes a voltage generating circuit that generates a first voltage having a temperature dependency and second and third voltages having no temperature dependency, and is configured to be capable of selecting a voltage value of the second voltage, a voltage value of the third voltage, a change coefficient to be multiplied by a fourth voltage that is obtained by subtracting the second voltage from the first voltage, and a sign of a fifth voltage that is obtained by multiplying the change coefficient by the fourth voltage, and the reference potential is generated by adding the third voltage to the fifth voltage.