Au-containing layer for charged particle beam processing

摘要

The invention provides a method for providing an Au-containing layer onto a surface of a work piece, which method comprises:
providing 510 a deposition fluid comprising Au(CO)Cl;depositing 520 the fluid on at least part of the surface of the work piece; anddirecting 530 a charged particle beam toward the surface of the work piece onto which at least part of the fluid is deposited to decompose Au(CO)Cl thereby forming the Au-containing layer on the surface of the work piece.;By using Au(CO)Cl as a precursor for charged particle induced deposition, a gold Au layer may be deposited with a very high purity compared to methods known in the art.

主权项

1. A method for providing an Au-containing layer onto a surface of a work piece, the method comprising:
providing a deposition fluid comprising Au(CO)Cl; adsorbing the deposition fluid on at least part of the surface of the work piece; and directing a charged particle beam toward the surface of the work piece onto which at least part of the deposition fluid is deposited to decompose Au(CO)Cl, thereby forming the Au-containing layer on the surface of the work piece.