Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device

摘要

A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.

主权项

1. A micromirror for a micromirror device, comprising:
a mirror side which is at least one of covered with a reflective coating and polished; and a back side which is directed away from the mirror side, the back side including:
at least one central area having at least one surface which is plane parallel to the mirror side,side areas on two opposite sides of the central area, each side area having at least one side surface of the back side that is at least one of curved and oriented inclined toward the mirror side, andat least one outer surface which is plane parallel to the mirror side and borders on a side of at least one of the side areas, wherein a height of the micromirror decreases starting from the central area along a cross section of the micromirror which extends through the central area and the side areas.