Semiconductor device and method for detecting damaging of a semiconductor device

摘要

A micro-electro-mechanical device includes a movable structure. The movable structure includes a test structure changing an electrical characteristic, if the movable structure is damaged. Further, a method for detecting damaging of a micro-electro-mechanical device includes detecting a change of an electrical characteristic of the electrical test structure of the movable structure. Further, the method includes indicating a deviation of the electrical characteristic from a predefined tolerable range.

主权项

1. A micro-electro-mechanical device comprising:
a movable structure, wherein the movable structure comprises a test structure changing an electrical characteristic, if the movable structure is damaged, and wherein the movable structure comprises a pn-junction between a first lateral doping region of the movable structure and a second lateral doping region of the movable structure.