PACKAGE INTEGRATED SYNTHETIC JET DEVICE

摘要

Embodiments include a synthetic jet device formed within layers of a package substrate, such as to provide a controlled airflow for sensing or cooling applications. The jet device includes an electromagnetically driven vibrating membrane of conductive material between a top and bottom cavity. A top lid with an opening covers the top cavity, and a permanent magnet is below the bottom cavity. An alternating current signal conducted through the membrane causes the membrane to vibrate in the presence of a magnetic field caused by the permanent magnet. By being manufactured with package forming processes, the jet (1) is manufactured more cost-effectively than by using silicon chip or wafer processing; (2) is easily integrated as part of and with the other layers of a package substrate; and (3) can be driven by a chip mounted on the package. Embodiments also include systems having and processes for forming the jet.

主权项

1. A method of forming a synthetic jet device;
forming a metal lower support for a vibrating membrane in an opening in a first layer of dielectric material disposed over a carrier substrate; forming a conductive metal vibrating member on the lower support; forming a metal upper support for a top lid in an opening in a second layer of dielectric material disposed over the vibrating member; removing a portion of the second layer of dielectric material from above the vibrating member to form a top cavity above the vibrating member; removing a portion of the first layer of dielectric material from below the vibrating member to form a bottom cavity below the vibrating member; forming a top lid across a top surface of the upper support to form the top cavity between the top lid and the top surface of the vibrating member, the top lid having an opening; and attaching a magnet across the bottom surface of the lower support to form the bottom cavity between the magnet and the bottom surface of the vibrating member.