CLOSURE ELEMENT FOR A VACUUM SEAL HAVING A FRICTION STIR WELDING CONNECTION

摘要

Closure element for a vacuum valve having a valve disk realized for the gas-tight closure of a process volume by means of interaction with a vacuum valve opening of the vacuum valve provided for the process volume, wherein the valve disk comprises a closure side and an oppositely situated rear side which is substantially parallel thereto and a first sealing face which is assigned to the closure side and corresponds to a second sealing face of the vacuum valve opening, in particular with regard to form and size, with cured-on sealing material, wherein the second sealing face runs around the vacuum valve opening, and a cross carrier with a receiving means for a drive component transversely with respect to an extension direction of the cross carrier, wherein the cross carrier is connected to the valve disk on the rear side of the valve disk at at least one connection point. The connection of the cross carrier to the valve disk comprises a friction stir welding connection at the at least one connection point.

主权项

1. A closure element for a vacuum valve having
a valve disk realized for the gas-tight closure of a process volume by means of interaction with a vacuum valve opening of the vacuum valve (1) provided for the process volume, wherein the valve disk
comprises a closure side and an oppositely situated rear side which is substantially parallel thereto anda first sealing face which is assigned to the closure side and corresponds to a second sealing face of the vacuum valve opening, in particular with regard to form and size, in particular with cured-on sealing material, wherein the second sealing face runs around the vacuum valve opening, and a cross carrier, in particular with a receiving means for a drive component transversely with respect to an extension direction of the cross carrier, wherein the cross carrier is connected to the valve disk on the rear side of the valve disk at at least one connection point, wherein the connection of the cross carrier to the valve disk at the at least one connection point comprises a friction stir welding connection.