发明名称 METHOD AND DEVICE FOR SURFACE TREATMENT OF SUBSTRATES
摘要 A method for surface treatment of an at least primarily crystalline substrate surface of a substrate such that by amorphization of the substrate surface, an amorphous layer is formed at the substrate surface with a thickness d>0 nm of the amorphous layer. This invention also relates to a corresponding device for surface treatment of substrates.
申请公布号 US2017098572(A1) 申请公布日期 2017.04.06
申请号 US201415315900 申请日期 2014.06.24
申请人 EV Group E. Thallner GmbH 发明人 Wimplinger Markus
分类号 H01L21/762;C23C14/48 主分类号 H01L21/762
代理机构 代理人
主权项
地址 St. Florian am Inn AT