| 发明名称 |
THIN-FILM THICKNESS MEASURER AND THIN-FILM DEPOSITING APPARATUS INCLUDING THE SAME |
| 摘要 |
Provided is a thin-film thickness measurement apparatus including a light output unit including a light emitter configured to emit light onto a target. A light receiving unit is configured to receive light reflected from the target. A blowing unit is configured to eject a gas around the light emitter. |
| 申请公布号 |
US2017097226(A1) |
申请公布日期 |
2017.04.06 |
| 申请号 |
US201615075642 |
申请日期 |
2016.03.21 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
SEO JIHOON;SON PANMOK;YANG DONGGYU;KIM JONGWOOK;MOOK YONGJOON;PARK JAEYOUNG;YANG KYOUNGHO;YOO JEONGGEUN;KIM JINTAE |
| 分类号 |
G01B11/06;C23C16/455;C23C16/52 |
主分类号 |
G01B11/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A thin-film thickness measurement apparatus comprising:
a light output unit including a light emitter configured to emit light onto a target; a light receiving unit configured to receive light reflected from the target; and a blowing unit configured to eject a gas around the light emitter. |
| 地址 |
YONGIN-SI KR |
